• Measurement of resistivity, thickness, conductivity(P/N) and temperature
• Tester self-test function, wide measuring range
• Thickness, measurement position and temperature correction function for silicon resistivity
• Number of cassette station can be changed by customers request
• Host (CIM) communication and SMIF or FOUP compatible

• Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• Others (*Please contact us for details)

3 ~ 8 inch (or 12 inch)

[R] 100μ~1M Ω・cm

[RS] 1m~10M Ω/sq

• Automatic probe head selection(exchanger) among 4 kinds of probe head
  [No need to exchange a probe head by each different sample measurement]
• Edge 1mm measurement is available by dual meas. mode
• High cost performance from high speed measurement
• FOUP compatible, GEM / SECS compatible

• Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• Conductive thin film (Metal, ITO etc)
• Diffused sample (or layer)
• Silicon-related epitaxial materials, Ion-implantation sample
• Others (*Please contact us for details)

~300mm(and/or Optional 200mm)

[RS] 1m~10M Ω/sq

• Fully automatic system for large sizes of flat panel with glass loading robot
• Tester self-test function, Measurement position correction function, wide measurement range
• Min. 0.1 mm meas. resolution and user programmable test pattern
• Host (CIM) communication and 2-D/3-D Mapping software

• Conductive thin film (Metal, ITO etc)
• Silicon-related thin films (LTPS etc), IGZO

~2,880 ｘ 3,080mm

1. RT-3000/S version;

[RS] 1m~10M Ω/sq

2. RT-3000/H version;

［RS] 10mΩ/sq?1GΩ/sq

• Standard model in the world for the flat panel sheet resistance measurement system
• Tester self-test function, Measurement position correction function, wide measurement range
• Min. 0.1 mm meas. resolution and user programmable test pattern
• Glass map (search) function
• Host (CIM) communication,  2-D /3-D Mapping software

• Conductive thin film (Metal, ITO etc)
• Silicon-related thin films (LTPS etc), IGZO

~1,500 x 1,850mm

1. RT-3000/S version;

[RS] 1m~10M Ω/sq

2. RT-3000/H version;

［RS] 10mΩ/sq?1GΩ/sq