Full-automatic type with sample transfer system

Fully automatic(robotic transfer) 4 point probe system for silicon wafer

WS-8800

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  • Full-automatic type with sample transfer system

Selling Points

  • Measurement of resistivity, thickness, conductivity(P/N) and temperature
  • Tester self-test function, wide measuring range
  • Thickness, measurement position and temperature correction function for silicon resistivity
  • Number of cassette station can be changed by customers request
  • Host (CIM) communication and SMIF or FOUP compatible

 

Details

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • Others (*Please contact us for details)

Sample sizes

3 ~ 8 inch (or 12 inch)

Measuring range

[R] 100μ~1M Ω・cm

[RS] 1m~10M Ω/sq

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  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system

Fully automatic 4 point probe sheet resistance system for semiconductor process evaluate

WS-3000

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  • Full-automatic type with sample transfer system

Selling Points

  • Automatic probe head selection(exchanger) among 4 kinds of probe head
    [No need to exchange a probe head by each different sample measurement]
  • Edge 1mm measurement is available by dual meas. mode
  • High cost performance from high speed measurement
  • FOUP compatible, GEM / SECS compatible

Details

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • Conductive thin film (Metal, ITO etc)
  • Diffused sample (or layer)
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Others (*Please contact us for details)

Sample sizes

~300mm(and/or Optional 200mm)

Measuring range

[RS] 1m~10M Ω/sq

Image of Mapping

  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system

Global standard model for 4 point probe sheet resistance automatic measurement system

RT-3000/RG-1000F

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  • Full-automatic type with sample transfer system

Selling Points

  • Fully automatic system for large sizes of flat panel with glass loading robot
  • Tester self-test function, Measurement position correction function, wide measurement range
  • Min. 0.1 mm meas. resolution and user programmable test pattern
  • Host (CIM) communication and 2-D/3-D Mapping software

 

Details

Applications

  • Conductive thin film (Metal, ITO etc)
  • Silicon-related thin films (LTPS etc), IGZO

Sample sizes

~2,880 x 3,080mm

Measuring range

1. RT-3000/S version;

[RS] 1m~10M Ω/sq

2. RT-3000/H version;

[RS] 10mΩ/sq?1GΩ/sq

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  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system

Fully automatic 4 point probe sheet resistance system with glass cassette EV and glass loading stage

RT-3000/RS-1300

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  • Full-automatic type with sample transfer system

Selling Points

  • Standard model in the world for the flat panel sheet resistance measurement system
  • Tester self-test function, Measurement position correction function, wide measurement range
  • Min. 0.1 mm meas. resolution and user programmable test pattern
  • Glass map (search) function
  • Host (CIM) communication,  2-D /3-D Mapping software

Details

Applications

  • Conductive thin film (Metal, ITO etc)
  • Silicon-related thin films (LTPS etc), IGZO

Sample sizes

~1,500 x 1,850mm

Measuring range

1. RT-3000/S version;

[RS] 1m~10M Ω/sq

2. RT-3000/H version;

[RS] 10mΩ/sq?1GΩ/sq

Image of Mapping

  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system