Fully automatic 4 point probe sheet resistance system for semiconductor process evaluate
WS-3000
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Selling Points
- Automatic probe head selection(exchanger) among 4 kinds of probe head
[No need to exchange a probe head by each different sample measurement]
- Edge 1mm measurement is available by dual meas. mode
- High cost performance from high speed measurement
- FOUP compatible, GEM / SECS compatible
Details
Applications
- Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
- Conductive thin film (Metal, ITO etc)
- Diffused sample (or layer)
- Silicon-related epitaxial materials, Ion-implantation sample
- Others (*Please contact us for details)
Sample sizes
~300mm(and/or Optional 200mm)
Measuring range
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