マニュアルタイプ (1点測定システム)

Non-contact sheet resistance /resistivity measurement instrument

EC-80

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  • マニュアルタイプ (1点測定システム)

Selling Points

  • Easy operation and compact design
  • Auto-measurement start by inserting a wafer under the probe
  • Easy set up to measurement condition by JOG dial
  • 5 types of model for each measuring range

Details

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
  • Others (*Please contact us for details)

Sample sizes

~8 inch, ~156x156mm

 

Measuring range

[R] 1m ~ 200 Ω・cm

[RS] 10m ~ 3,000 Ω/sq

* The range is separated from each Low, Middle, High and S-High probe type.

 

*Please refer the measurement range for each probe type as below;
(1)  Low : 0.01~0.5Ω/□ (0.001~0.05Ω‐cm)
(2)  Middle : 0.5~10Ω/□ (0.05~0.5Ω‐cm)
(3)  High : 10~1000Ω/□ (0.5~60Ω‐cm)
(4)  S-High : 1000~3000Ω/□ (60~200Ω‐cm)

 

Hand held probe type eddy current sheet resistance/resistivity measurement instrument

EC-80P (Portable)

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  • マニュアルタイプ (1点測定システム)
  • マニュアルタイプ (1点測定システム)

Selling Points

  • Auto-measurement start by probe head contacting to sample
  • 3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance
  • Easy set up to measurement condition by JOG dial
  • 5 types of model for each measuring range
  • Resistivity probe can be changed by sample’s resistivity range

 

 

Details

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
  • Others (*Please contact us for details)

Sample sizes

Any size and shape can be measured(*Larger than 20mmφ and measurement plane must be flat)

 

Measuring range

[R] 1m ~ 200 Ω・cm

[RS] 10m ~ 3,000 Ω/sq

* The range is separated from each Low, Middle, High S-High, Solar-wafer  probe type.

 

*Please refer the measurement range for each probe type as below;
(1)  Low : 0.01~0.5Ω/□ (0.001~0.05Ω‐cm)
(2)  Middle : 0.5~10Ω/□ (0.05~0.5Ω‐cm)
(3)  High : 10~1000Ω/□ (0.5~60Ω‐cm)
(4)  S-High : 1000~3000Ω/□ (60~200Ω‐cm)
(5)  Solar-wafer : 5~500Ω/□ (0.2~15Ω‐cm)

 

Leaflet

*Please download leaflet as followings.

Download

Non-contact sheet resistance/resistivity measurement instrument with PC

NC-10 (NC-20)

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  • マニュアルタイプ (1点測定システム)

Selling Points

  • Easy operation and data processing by PC
  • No damage measurement by non-contact eddy current method
  • Replaceable probes by meas. range (*Second or more probe is for the option)
  • 1 point measurement of center position
  • 5 types of model for each measuring range
  • Temperature correction for silicon wafer function

Details

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
  • Others (*Please contact us for details)

Sample sizes

3 ~ 8 inch, ~156x156mm (Option; 2 inch and/or 12 inch, ~210x210mm)

 

Measuring range

[R] 1m ~ 200 Ω・cm

[RS] 10m ~ 3,000 Ω/sq

* The range is separated from each Low, Middle, High and S-High probe type.

 

*Please refer the measurement range for each probe type as below;
(1)  Low : 0.01~0.5Ω/□ (0.001~0.05Ω‐cm)
(2)  Middle : 0.5~10Ω/□ (0.05~0.5Ω‐cm)
(3)  High : 10~1000Ω/□ (0.5~60Ω‐cm)
(4)  S-High : 1000~3000Ω/□ (60~200Ω‐cm)

 

Hand held Sheet resistance measurement instrument
[Replaceable probe set (Non-destructive probe & Contact probe) ]

DUORES

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  • マニュアルタイプ (1点測定システム)

Selling Points

Easy to measure sheet resistance & carry around
Replaceable hand-held probes for Non-destructive & Contact type

•<NAPSON Original Technology> Replaceable hand-held probes for 2 kinds of measurement methods
<1> Non-destructivetype(Eddy current method)
<2> Contact type(4point probe method)
•Auto-measurement start by probe head unit put on/probe contact to sample
•Long-battery run time : 24h (*Battery-operated mode)
•Measurement data display : Max.100 data
•Measurement data save : Max.50,000 data
•Measurement data transfer by USB-Mini
•Measurement unit : Ω/□, S/□,n/m
•Data displayed by 4 digit floating decimal point

*Mainbody+Non-destructive probe set, Mainbody+Contact probe set are also available.

 

Details

Applications

Any sample within the measurement range
can be measured. (Films, Glass, Papers etc)
•Thin-film (ITO, TCOetc)
•Low-E-Glass
•CNT(Carbon nanotubes), Graphenmaterials
•Metals (nano-wires, grids, meshes, thin films)
•Others

 

Sample sizes

Any size and shape can be measured.
(*Larger than measurement spot size)

<Measurement Spot size>

・Non-destructive probe(Eddy current type) : φ25mm

・Contact probe(4point probe type) : 9mm

 

Measuring range

・Non-destructive probe(Eddy current type) : 0.5 -200 Ω/sq
・Contact probe(4point probe type) : 0.1 -4000 Ω/sq

 

Leaflet

*Please download leaflet as followings.

Download

Non-Contact (Pulse-Voltage excitation method) Ultra-Low Sheet resistance measurement system

PVE-80

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  • マニュアルタイプ (1点測定システム)
  • マニュアルタイプ (1点測定システム)

Selling Points

  • No damage measurement by non-contact Pulse-Voltage excitation method
  • Easy to measure & carry around, Removable stage plate
  • Easy operation and data processing by PC with Software
  • Measurement result can shown by 3 types of measurement unit(Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S])
  • *Pulse-Voltage excitation method : Pat. No.5386394
  •   Joint development with Chiba Univ.

Details

Applications

  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
  • Others (*Please contact us for details)

Sample sizes

~W300 x D210mm

Measuring range

50μ ~ 1m Ω/sq

Leaflet

*Please download leaflet as followings.

Download