Semi-automatic type Multi point measurement

Small foot print model of semi-automatic 4 point probe sheet resistance/resistivity measurement

Cresbox

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  • Semi-automatic type Multi point measurement

Selling Points

  • User programable measurement pattern & programmable measuring pattern
  • Tester self-test function, wide measuring range
  • Thickness, edge, temperature correction for silicon wafer
  • Film thickness conversion function from sheet resistance

 

Details

Applications

  • Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Diffused sample (or layer)
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Others (*Please contact us for details)

Sample sizes

~ 8 inch, ~156x156mm

 

Measuring range

[R] 1m~300k Ω・cm

[RS] 5m~10M Ω/sq

 

Leaflet

*Please download leaflet as followings.

Download

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  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement

Wide measurement range model of semi-automatic 4 point probe sheet resistance/resistivity measurement

RT-3000/RG-2000 (RG-3000)

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  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement

Selling Points

  • User programable measurement pattern & programmable measuring pattern
  • Tester self-test function, wide measuring range
  • Thickness, edge, temperature correction for silicon wafer
  • Film thickness conversion function from sheet resistance
  • 2 types measuring tester (S version: Standard type, H version: High range resistivity measurement type)

Details

Applications

  • Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Diffused sample (or layer)
  • Silicon-related thin films (LTPS etc), IGZO
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Others (*Please contact us for details)

Sample sizes

~ 8 inch, ~156x156mm

-Option(Large size stage: Model RG-3000); ~12 inch, ~210x210mm

 

Measuring range

1. RT-3000/S version;

[R] 100μ~1M Ω・cm

[RS] 1m~10M Ω/sq

 

2. RT-3000/H version;

[RS] 10mΩ/sq?1GΩ/sq

 

Leaflet

*Please download leaflet as followings.

Download

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  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement

Semi-auto 4 point probe measurement system for Flatpanel display

RG-100PV

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  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement

Selling Points

  • Measurement system for thin film on substrate samples for multi-points measurement
  • Even pitch and random pitch for Max.1,000 points
  • 2-D/3-D square mapping software for even pitch

 

 

Details

Applications

  • Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Diffused sample (or layer)
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Others (*Please contact us for details)

Sample sizes

~300x300mm (Option; ~500x500mm)

 

Measuring range

[R] 1m~200 Ω・cm

[RS] 1m~1,000k Ω/sq (Option; ~10M Ω/sq)

 

Related product

Measurement stage for solar cell wafer : RG-200PV
Measurement stage for diffused wafer (9 point measurement/1 time) : DFP-9

 

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  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement