Combinational measurement system by Measurement tester(RT-70V) & Stage.

<Measurement tester ; RT-70V >

• Thickness input with easy JOG dial operation (RT-70V Tester)
• Tester self-test function/Auto change-over measurement range function

<Measurement stage>

*You can choose from following stage models by your purpose & applications.

• (1) RG-7C [Image of Product ; upper left] : Electric probe up-down stroke.
• (2) RG-5 [Image of Product ; lower left] : Manual probe up-down stroke by handle lever.
• (3) RG-7S [Image of Product ; upper right] : Electric probe up-down stroke for Glass or Film sample using X-Y universal stage.
• (4) TS-7D [Image of Product ; lower right] :Hand held four point probe measurement instrument.  *Stage plate is an option.

• Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
• Conductive thin film (Metal, ITO etc)
• Diffused sample (or layer)
• Silicon-related thin films (LTPS etc), IGZO
• Silicon-related epitaxial materials, Ion-implantation sample
• Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
• Others (*Please contact us for details)

*Depends on measurement stage.

Up to <Circle> 300mm(12 inch) or <Square> 730x920mm size.

[R] 1μ~3M Ω・cm
[RS] 5m~10M Ω/sq

Controlled Thermo-chuck (room temperature～600℃/less than 20 minutes)
600C compatible probe head with 1mm linear
Controlled with vacuum sensor, digital thermo-meter, vacuum gauge and gas flow meter
Temperature measuring accuracy：±（0.5% + 1℃）

• Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• Conductive thin film (Metal, ITO etc)
• Others (*Please contact us for details)

φ10mm or 5mmX10mm～35mmX35mm or others

10μ～100k Ω・cm

Easy to measure sheet resistance & carry around
Replaceable hand-held probes for Non-destructive & Contact type

•<NAPSON Original Technology> Replaceable hand-held probes for 2 kinds of measurement methods
<1> Non-destructivetype(Eddy current method)
<2> Contact type(4point probe method)
•Auto-measurement start by probe head unit put on/probe contact to sample
•Long-battery run time : 24h (*Battery-operated mode)
•Measurement data save : Max.100 data
•Measurement data transfer by USB-Mini
•Data displayed by 4 digit floating decimal point

*Mainbody+Non-destructive probe set, Mainbody+Contact probe set are also available.

Any sample within the measurement range
can be measured. (Films, Glass, Papers etc)
•Thin-film (ITO, TCOetc)
•Low-E-Glass
•CNT(Carbon nanotubes), Graphenmaterials
•Metals (nano-wires, grids, meshes, thin films)
•Others

Any size and shape can be measured.
(*Larger than measurement spot size)

<Measurement Spot size>

・Non-destructive probe(Eddy current type) : φ25mm

・Contact probe(4point probe type) : 9mm

・Non-destructive probe(Eddy current type) : 0.5 -200 Ω/sq
・Contact probe(4point probe type) : 0.1 -4000 Ω/sq