Semi-automatic type Multi point measurement

Non-contact sheet resistance multi-points measurement system with wide range

NC-80MAP

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  • Semi-automatic type Multi point measurement

Selling Points

  • Possible to measure wide range of sheet resistance by installing Max. 4 probes
    Min. 7 mm position from edge can be measured
  • User programable measurement pattern & programmable measuring pattern
  • *Option: thickness measurement probe (for silicon wafer)

 

Details

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
  • Others (*Please contact us for details)

 

Sample sizes

2 ~ 8 inch (Option; 12 inch)

Measuring range

[R] 1m ~ 200 Ω・cm

[RS] 10m ~ 3,000 Ω/sq

* The range is separated from each Low, Middle, High and S-High probe type.

*Please refer the measurement range for each probe type as below;
(1)   Low : 0.01~0.5Ω/□ (0.001~0.05Ω‐cm)
(2)  Middle : 0.5~10Ω/□ (0.05~0.5Ω‐cm)
(3)  High : 10~1000Ω/□ (0.5~60Ω‐cm)
(4)  S-High : 1000~3000Ω/□ (60~200Ω‐cm)

Leaflet

 

*Please download leaflet as followings.

Download

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  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement

Non-contact Ultra-High range sheet resistance measurement system

CRN-100

Image of Product

  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement

Selling Points

  • Ultra-High range sheet resistance measurement for 10E+9 ~ 10E+15 ohm/sq without contacting
  • Mapping program software;
  • 1. Arranged in a multipoint pattern measurement is programmed
  • 2. 2-D & 3-D mapping software
  • Easy operation by Windows 7 system software
  • Measurement data base link with Excel via CSV format file
  • Unaffected by contact resistance

 

*Corona Discharge Method : Pat. No.5510629

Joint development with Yamagata Univ.

(Associate Professor : Dr. Toshiyuki Sugimoto)

Details

Applications

Any sample within the measurement range can be measured.

  • Thin film layer (a-Si, IGZO etc)
  • Coating material
  • Semiconductor material
  • Approximate material as Insulator

*Please contact us for details.

Sample sizes

Size : Max. 300 x 400 mm (or more)

Thickness : Max. 2 mm

*We can design as your requirement. Please contact us for customize.

Measuring range

10E+9 ~ 10E+15 ohm/sq

Leaflet

*Please download leaflet as followings.

Download

Image of Mapping

  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement