Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
Others (*Please contact us for details)
Sample sizes
2 ~ 8 inch (Option; 12 inch)
Measuring range
[R] 1m ~ 200 Ω・cm
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.
*Please refer the measurement range for each probe type as below;
(1) Low : 0.01~0.5Ω/□ (0.001~0.05Ω‐cm)
(2) Middle : 0.5~10Ω/□ (0.05~0.5Ω‐cm)
(3) High : 10~1000Ω/□ (0.5~60Ω‐cm)
(4) S-High : 1000~3000Ω/□ (60~200Ω‐cm)
Leaflet
*Please download leaflet as followings.
Image of Mapping
Non-contact Ultra-High range sheet resistance measurement system
CRN-100
Image of Product
Selling Points
Ultra-High range sheet resistance measurement for 10E+9 ~ 10E+15 ohm/sq without contacting
Mapping program software;
1. Arranged in a multipoint pattern measurement is programmed
2. 2-D & 3-D mapping software
Easy operation by Windows 7 system software
Measurement data base link with Excel via CSV format file
Unaffected by contact resistance
*Corona Discharge Method : Pat. No.5510629
Joint development with Yamagata Univ.
(Associate Professor : Dr. Toshiyuki Sugimoto)
Details
Applications
Any sample within the measurement range can be measured.
Thin film layer (a-Si, IGZO etc)
Coating material
Semiconductor material
Approximate material as Insulator
*Please contact us for details.
Sample sizes
Size : Max. 300 x 400 mm (or more)
Thickness : Max. 2 mm
*We can design as your requirement. Please contact us for customize.