Resistivity Reference Wafer : NRW Series

Resistivity Reference Wafer : NRW Series

NRW series

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  • Resistivity Reference Wafer : NRW Series
  • Resistivity Reference Wafer : NRW Series

Selling Points

NRW series are resistivity reference wafers which proven by Napson’s resistivity measurement system. NRW series use wafers with neutron irradiation, and excellent stability.

Napson’s four-probe resistivity measurement system has been calibrated by standard wafers (NIST, VLSI), and conforms to the standards stipulated by the following SEMI standards, Japanese Industrial Standards (JIS) and American Materials Testing Association (ASTM).

 

<Compliance standards>

[SEMI Standards]

 SEMI-MF43-99, SEMI-MF374-02, SEMI-MF84-02, SEMI-MF1529-02

[American Society for Testing and Materials]

 ASTM-F-84-99(SEMI-MF84), ASTM-F-374-00a,  ASTM-F-390-11, ASTM-F-1529-97

[Japan Industrial Standards]

 JIS-H-0602-1995

Details

 

<Material>  Silicon

<Production method>  FZ

<Wafer finish frontside/backside>  Lapped

<Wafer orientation>  (1-1-1) ± 1 deg.

<Doping>  N-type (Phosphorous)

<Wafer size>   Φ100mm(4inch)

<Wafer Thickness>  *Depends on NRW wafer type. Please refer following specs.

 

Types

Resistivity

(Ohm.cm)

Thickness

(µm)

Sheet resistance

(Ohm/sq)

*calculated value

NRW-1-28

 28.00 ±2.00

559.00 ±25.00

Approx. 500

NRW-2-110

 110.00 ±11.00

580.00 ±10.00

Approx. 2000

NRW-3-200

 200.00 ±12.00

675.00 ±25.00

Approx. 3000

NRW-4-330

 330.00 ±25.00

675.00 ±25.00

Approx. 5000

NRW-5-550

 550.00 ±50.00

450.00 ±25.00

Approx. 12000

 

<Guaranteed accuracy of Resistivity>

Guaranteed position

Accuracy

Center area

(*φ5mm spot from sample center

± 3 %

*Napson’s evaluation criteria conditions / guarantee accuracy under the environment

Leaflet

(日本語)

*Please download leaflet as followings.

Download